Laser gas purifying apparatus

Details Laser gas purifying apparatus Laser gas purifying apparatus

1991-01-22

1992-05-05

Epps, Georgia Y.

Coherent light generators

Particular active media

Gas

H01S 322

Patent

active

051114739

ABSTRACT:
In an apparatus for purifying laser gas, comprising a cooling circuit for cleaning of the laser gas, the cooling circuit is separable from the laser and operable by way of a shunt line, independently of the laser.

REFERENCES:
patent: 3810043 (1974-05-01), Locke et al.
patent: 4674098 (1987-06-01), Turner
patent: 4674099 (1987-06-01), Turner
patent: 4723254 (1988-02-01), Turner
patent: 4740982 (1988-04-01), Hakuta et al.
patent: 4803693 (1989-02-01), Schramm
patent: 5014281 (1991-05-01), Hecht et al.
Patent Abstracts of Japan --E--868 Jan. 8, 1990 vol. 14/No. 2-"Excimer Laser Apparatus" M. Wutz.
H. Adam & W. Walcher-"Theorie und Praxis der Vacuumtechnik"-1986 pp. 573-575 and 205-206.

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