Laser gas displacement amount control method

Coherent light generators – Particular active media – Gas

Patent

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Details

H01S 322

Patent

active

050881019

DESCRIPTION:

BRIEF SUMMARY
TECHNICAL FIELD

The present invention relates to a laser gas displacement amount control method for controlling the amount of displacement of a laser gas in a discharge pumping type gas laser device, and more particularly, to a laser gas displacement amount control method permitting a reduction in the amount of consumption of the laser gas.


BACKGROUND ART

In a discharge pumping type gas laser device, some atmospheric air seeps into the blast system when the device is not operating, and therefore, after starting, the laser gas must be displaced by not less than a predetermined amount of fresh gas. If this operation is not performed, usually the control characteristic of the laser output is adversely affected. More specifically, the first transition of an actual laser output for a step command value is delayed.
Accordingly, the laser gas is displaced by this predetermined amount, which is kept at a constant value from the start to the end of the operation.
If the operation is continued for a predetermined period, however, most unnecessary components introduced therein during the non-operating state are exhausted to the outside, so that the control characteristic of the laser output cannot be lowered without displacing the amount required immediately after the start, and thus it is pointless to keep the displacement amount at a constant value during the period from the start to the end of operation.


DISCLOSURE OF THE INVENTION

It is an object of the present invention has been contrived in consideration of these circumstances, and thereof is to provide a laser gas displacement amount control method by which a reduction in the amount of consumption of the laser gas is obtained.
To solve the above problem, according to the present invention, there is provided a laser gas displacement amount control method for controlling the amount of displacement of a laser gas in a discharge pumping type gas laser device. In the laser gas displacement amount control method, the laser gas is displaced by a predetermined displacement amount during a fixed period immediately after starting. The laser gas is displaced by a displacement amount smaller than the predetermined displacement amount during the operation period after the lapse of the fixed period immediately after starting.
During the fixed period immediately after starting, the displacement is rapidly effected with a large displacement amount, to remove unnecessary components introduced therein during the non-operating state. In the operation period after the end of the fixed period, the displacement amount is limited to the minimum amount required only for replacement of laser gas deteriorated by the electric discharge. Since this displacement amount can be made less than one-tenth of the displacement amount required during the fixed period immediately after starting, the amount of consumption of the laser gas can be reduced.


BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram of a gas control system for effecting the laser gas displacement amount control method according to the present invention;
FIG. 2 is a graph showing time-dependent changes of the gas pressure in a blast system; and
FIG. 3 is a graph showing time-dependent changes of gas displacement amount based on the laser gas displacement amount control method according to an embodiment of the present invention.


BEST MODE OF CARRYING OUT THE INVENTION

An embodiment of the present invention will now be described with reference to the drawings.
FIG. 1 is a block diagram of a gas control system in a gas laser device to which the present invention is applied. In FIG. 1, numeral 1 denotes a gas supply unit, e.g., a gas cylinder under a pressure of 1 to 2 kgf/cm.sup.2. Numerals 2 and 3 denote a 2-.mu.m primary filter for gas cleaning and a supply valve, respectively, and numeral 4 denotes a 0.5-.mu.m secondary filter for gas cleaning, which removes dust and the like introduced thereto when the gas passes through a gas pipe and the gas flow control valve 3.
Numeral 5 denotes a blast system, which

REFERENCES:
patent: 4592063 (1986-05-01), Accetta et al.
patent: 4794613 (1988-12-01), Nilsen et al.
patent: 4937837 (1990-06-01), Iehisa

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