Laser evaporation method for forming high Tc superconducting fil

Details Laser evaporation method for forming high Tc superconducting fil Laser evaporation method for forming high Tc superconducting fil

1992-07-29

1993-11-02

King, Roy

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505732, 505730, 427 62, 427596, 427314, B05D 306, B05D 512

Patent

active

052583660

ABSTRACT:
Improvement in a method for preparing a superconducting thin film of compound oxide on a substrate (6) by laser evaporation technique. A rear surface of a target (7) used is cooled forcedly by a cooling system (9) during film formation.

REFERENCES:
patent: 5094880 (1992-03-01), Hongoh
Koren et al., "Highly oriented as-deposited superconducting laser ablation thin films of Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-.delta. on SrTiO.sub.3, zirconia, and Si substrates", Appl. Phys. Lett. 53(23) Dec. 1988 pp. 2330-2332.
Dijkkamp et al., "Preparation of Y-Ba-Cu Oxide superconductor thin films using pulsed laser evaporation from high Tc bulk material", Appl. Phys. lett. vol. 51, No. 8, aug. 1987 pp. 619-621.

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