Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1984-09-28
1986-11-11
Roy, Upendra
Metal working
Method of mechanical manufacture
Assembling or joining
29576B, 29576T, 148 15, 148175, 148187, 148DIG91, 357 91, H01L 21263, H01L 21265
Patent
active
046214119
ABSTRACT:
Optical illumination rather than furnace heating is used to drive in MOSFET source and drain diffusions, preferably using a surface layer of antimony as the dopant source. This results in substantially less overlap between the gate and the source and drain diffusions. Similarly, if the present invention is practiced in a process having gate sidewalls less than zero overlap can be achieved.
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Havemann Robert H.
Porter Vernon R.
Comfort James T.
Groover III Robert
Roy Upendra
Sharp Melvin
Texas Instruments Incorporated
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