Laser-driven microwelding apparatus and process

Details Laser-driven microwelding apparatus and process Laser-driven microwelding apparatus and process

1997-01-22

1999-08-17

Evans, Geoffrey S.

Electric heating

Metal heating

By arc

21912163, B23K 2600

Patent

active

059389524

ABSTRACT:
A microelectronic packaging and interconnection apparatus and method in which dual ball bonds, metal bumps, or TAB bonds are formed by pulsed laser irradiation, but not conventional heating, compression or acoustic (e.g., ultrasonic) methods. A miniature loop forming tool is used to form a metallic wire loop, one end of which is welded to an IC bond pad while the other end of which is welded to an IC package bonding finger, thus forming ball bonds at both ends of the interconnection.

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