Laser-driven cleaning using reactive gases

Details Laser-driven cleaning using reactive gases Laser-driven cleaning using reactive gases

2005-08-23

2005-08-23

Elve, M. Alexandra (Department: 1725)

Electric heating

Metal heating

By arc

C219S121830, C219S121860

Reexamination Certificate

active

06933464

ABSTRACT:
A method and apparatus for removing contaminants from the surface of a substrate. An explosive medium is introduced into a vicinity of the substrate, and a beam of electromagnetic energy is directed toward the substrate. Absorption of the electromagnetic energy causes the explosive medium both to generate a blast wave and to form reactive species, the blast wave and the reactive species cooperating to remove the contaminants from the surface substantially without damage to the surface itself.

REFERENCES:
patent: 4987286 (1991-01-01), Allen
patent: 5114834 (1992-05-01), Nachshon
patent: 5669979 (1997-09-01), Elliott et al.
patent: 5814156 (1998-09-01), Elliott et al.

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