Laser drawing apparatus with precision scaling-correction

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250235, 347234, 355 53, 358296, 358481, 36446828, G06F 1900, B43L 1300

Patent

active

059800887

ABSTRACT:
A laser drawing apparatus is used to draw a pattern on a surface of a workpiece by scanning the workpiece surface with at least one laser beam and by modulating the laser beam on the basis of raster-graphic data in accordance with a series of clock pulses. In the apparatus, a detector detects a dimensional variation of the workpiece in a scanning direction of the laser beam with respect to a corresponding standard dimension of an ideal workpiece. A calculator calculates a degree of variation the dimension of the workpiece and the corresponding standard dimension of the ideal workpiece. A regulator serves to cyclically shift a phase of the clock pulses by a unit of less than 2.pi., whereby the pattern to be drawn on the workpiece is dimensionally varied, in accordance with the degree of the dimensional variation of the workpiece.

REFERENCES:
patent: 4541712 (1985-09-01), Whitney
patent: 4677292 (1987-06-01), Shimada
patent: 5018212 (1991-05-01), Manns et al.
patent: 5477330 (1995-12-01), Dorr
patent: 5635976 (1997-06-01), Thuren et al.

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