Laser drawing apparatus

Details Laser drawing apparatus Laser drawing apparatus

1994-07-22

1999-04-06

Spyrou, Cassandra

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359212, 359216, 359629, 347243, G02B 2608

Patent

active

058926119

ABSTRACT:
A laser drawing apparatus is provided that splits a laser light into a plurality of drawing beams aligned in a common plane. The aligned drawing beams are reflected and deflected through a deflecting mirror to scan a drawing surface. The beams reflected off the mirror are converged through a scanning optical system onto the drawing surface in such a manner that the height of the drawing beams on the drawing surface is in proportion to the deflection angle and a strict relationship exists between the various incident and reflecting angles as well as the focal length of the scanning optical system and pitch of the drawing beams.

REFERENCES:
patent: 4915465 (1990-04-01), Sugiura
patent: 4975717 (1990-12-01), Takemoto et al.
patent: 5046795 (1991-09-01), Morimoto et al.
patent: 5194981 (1993-03-01), Morimoto

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