Laser diode with substrate-side protection

Details Laser diode with substrate-side protection Laser diode with substrate-side protection

1998-05-01

2000-01-11

Mulpuri, Savitri

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Substrate dicing

438462, H01L 21302

Patent

active

060135409

ABSTRACT:
A semiconductor optical device is formed to include a substrate-side dielectric barrier layer in the area where the substrate and facet meet. The dielectric is deposited on the substrate surface prior to cleaving of the facet and results in reducing the defects along the facet. The dielectric material also serves as a substrate-side "anchor" for the dielectric deposited on the facet, reducing the incidence of delamination of the dielectric coating from the facet.

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patent: 5668049 (1997-09-01), Chakrabarti et al.

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