Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Mesa formation
Reexamination Certificate
2007-02-13
2007-02-13
Wilczewski, M. (Department: 2822)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Mesa formation
C438S046000
Reexamination Certificate
active
10753568
ABSTRACT:
A laser diode includes an active layer of a group III-V compound semiconductor device containing N and As as the group V elements. The active layer has exposed lateral edges wherein the N atoms are substituted by the As atoms at the exposed lateral edges by an annealing process conducted in a AsH3atmosphere.
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Dickstein & Shapiro LLP
Ricoh & Company, Ltd.
Wilczewski M.
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