Laser diode coupling to waveguide and method of making same usin

Details Laser diode coupling to waveguide and method of making same usin Laser diode coupling to waveguide and method of making same usin

1992-09-29

1995-01-03

Healy, Brian

Optical waveguides

With optical coupler

Particular coupling structure

385 14, 385129, 385130, 437 15, 437 51, 437225, G02B 612, H01L 2170

Patent

active

053793595

ABSTRACT:
A method of making an optical device including a semiconductor laser and a waveguide optically coupled to the laser, includes the steps of providing a substrate formed from a material on which a semiconductor laser can be created; sequentially creating a plurality of layers of relatively different impurity types and concentrations on the substrate, to form a laser structured region; forming a first mirror at one edge of the laser structured region; removing a portion of the laser structured region opposite the one edge by etching the region to a preselected depth selected so that a waveguide mounted on the substrate in the etched region is vertically aligned with a light emitting portion of the laser structured region; and forming a second mirror on the edge of the laser structured region opposite the first edge and adjacent the etched portion. A waveguide structure mounted on the etched surface of the substrate adjacent the laser diode can be very efficiently coupled to the laser diode by aligning it only in the horizontal direction, which is not as critical as the vertical alignment.

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