Laser device and exposure device using the same

Details Laser device and exposure device using the same Laser device and exposure device using the same

2007-07-17

2007-07-17

Font, Frank G. (Department: 2883)

Optical waveguides

With optical coupler

Input/output coupler

C372S043010

Reexamination Certificate

active

10857547

ABSTRACT:
In a laser module, a laser beam which is emitted from a laser element is focused by a condensing optical system and caused to enter an incidence end of an optical fiber. A laser device is provided with a plurality of these laser modules. Emission end portions of the optical fibers are bundled to form a laser emission portion. A thickness of cladding h of each optical fiber is set to a value calculated in accordance with the following equation:claddingthickness⁢⁢h≤(emission⁢⁢light⁢⁢amountof⁢⁢one⁢⁢laser⁢⁢module⁢⁢Wrequiredintensity⁢⁢C×packingratio⁢⁢P-corediameter⁢⁢t)÷2As a result, it is possible to emit a laser-beam with a high intensity that is required for functionality as a laser light source, for the purpose of raising resolution of an exposure apparatus.

REFERENCES:
patent: 5394492 (1995-02-01), Hwang
patent: 5790576 (1998-08-01), Waarts et al.
patent: 6188814 (2001-02-01), Bhalla
patent: 2000-81533 (2000-03-01), None
patent: 2002-202442 (2002-07-01), None
patent: 98/47048 (1998-10-01), None
Jenny, Reinhard, Fundamentals of Fiber Optics, Apr. 26, 2000, www.volpiusa.com.

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