Laser depositon of crystalline boron nitride films

Details Laser depositon of crystalline boron nitride films Laser depositon of crystalline boron nitride films

1990-05-16

1993-11-23

Turner, A. A.

Stock material or miscellaneous articles

Composite

Of inorganic material

428446, 428457, 428704, C23C 1406

Patent

active

052642968

ABSTRACT:
Thin films of boron nitride are grown on single crystal silicon substrates using laser deposition techniques. The films are characterized by essentially a single crystal throughout and having a cubic structure which is in epitaxial registry with the underlying silicon substrate.

REFERENCES:
patent: 4118539 (1978-10-01), Hirai et al.
patent: 4297387 (1981-10-01), Beale
patent: 4565741 (1986-01-01), Morimoto et al.
patent: 4714625 (1987-12-01), Chopra et al.
patent: 4832986 (1989-05-01), Gladfelter et al.
patent: 4843031 (1989-06-01), Banh et al.
patent: 4957773 (1990-09-01), Spencer et al.
patent: 4973494 (1990-11-01), Yamazaki
patent: 4980730 (1990-12-01), Mishima et al.
Doll et al "Laser Deposited Cubic Boron Nitride Films" MRS Spring Meeting Apr. 1990 San Francisco Calif.
Doll et al "Laser Deposited Cubic Boron Nitride Films on Silicon" 2nd Int. Conf. on the New Diamond Sci & Tech, Sep. 23-27, 1990 D.C.
Doll et al "The Growth & Characterization of Epitaxial Cubic Boron Nitride Films on Silicon" Submitted to Phy. Rev. Lett Oct. 25, 1990.
Paul et al "Laser Assited Deposition of BN Films on InP for MIS Application" Electronics Letters, 9th Nov. 1989, vol. 25, No. 23 pp. 1602-1603.
"Laser Pulse Vapour Deposition of Polycrystalline Wurtzite-type BN", Thin Solid Films, 147 (1987) L45-L50.
"Growth of Stoichiometric BN Films by Pulsed Laser Evaporation", Mat. Res. Soc. Symp. Proc., vol. 128 (1989) pp. 469-474.
Chemical Abstract 110(22): 197972n.
Rother et al, "Preparation & Characterization of Ion Plated Boron Nitride", Thin Solid Films, vol. 142, pp. 83-99 (1986).
Weismantel et al, "Preparation and Properties of Hard i-C and i-BN Coatings", Thin Solid Films, vol. 98, pp. 31-44 (1982).
Thin Solid Films, vol. 153, No. 1, 26th Oct. 1987, pp. 487-496; P. Lin et al.: "Preparation and properties of cubic boron nitride coatings" *Abstract*.
A. R. Badzian, "Cubic Boron Nitride--Diamond Mixed Crystals", Mat. Res. Bull., vol. 16, pp. 1385-1393, (1981).
G. Kessler et al, "Laser Pulse Vapour Deposition of Polycrystalline Wurtzite-type BN", Thin Solid Films, vol. 147, pp. L45-L50 (1987).
P. T. Murray et al, "Growth of Stoichiometric BN Films by Pulsed Laser Evaporation", Mat. Res. Soc. Cymp. Proc., vol. 128, pp. 469-474 (1989).
G. L. Doll et al, "X-ray Diffraction Study of Cubic Boron Nitride Films Grown Epitaxially on Silicon", Mat. Res. Soc., Boston, Mass. (1990).
E. G. Bauer et al. Mat. Res. 5, 852 (1990).
S. Koizumi et al, Appl. Phys. Lett. 57, 563 (1990).
S. P. S. Arya et al, Thin Solid Films 157, 267 (1988).
H. Sankur et al, Appl. Phys. A 47, 271 (1988).
B. E. Williams et al, J. Mat. Res. 4, 373 (1989).
J. S. Speck et al, J. Mat. Res. 5, 980 (1990).
S. V. Gaponov et al, Sov. Tech. Phys. 27, 1130 (1982).
S. J. Thomas et al, Appl. Phys. Lett. 40, 200 (1982).
J. E. Rothenberg et al, Nucl. Instr. and Meth. B1, 291 (1984).
B. D. Cullity, "Elements of X-ray Diffraction" 2nd Edition, (Addison-Wesley, Reading, Mass., 1978), p. 142.
R. N. Sheftal et al, Crys. Res.Tech. 16, 887 (1981).
G. L. Doll et al, "Effects of Excimer Laser Ablation on the Surfaces of Hexagonal Boron Nitride Targets", Mat. Res. Soc., Boston, Mass. (1990).
D. Dijkkamp et al, Appl. Phys. Lett. 51, 619 (1987).
Q. Y. Ying et al, Appl. Phys. Lett. 55, 1041 (1989).
J. T. Cheung et al, CRC Critical Reviews in Solid State and Materials Sciences 15, 63 (1988).
J. P. Rebouillat et al, Proceedings of the Materials Research Society vol. 151, 259 (1989).
H. Schwartz et al, J. Vac. Sci. Techn. 6, 373 (1969).
S. G. Hansen et al, Appl. Phys. Lett. 52, 81 (1988).
R. J. Nemanich et al, Phys. Rev. B 23, 6348 (1981).

Affiliated with

Also associated with

Rating

Laser depositon of crystalline boron nitride films does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser depositon of crystalline boron nitride films, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser depositon of crystalline boron nitride films will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1847631