Laser deposition of cubic boron nitride films

Details Laser deposition of cubic boron nitride films Laser deposition of cubic boron nitride films

1993-05-14

1994-01-18

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Chemical vapor deposition

427255, 4272552, 427596, B05D 306

Patent

active

052798690

ABSTRACT:
Thin films of boron nitride are grown on single crystal silicon substrates using laser deposition techniques. The films are characterized by essentially a single crystal throughout and having a cubic structure which is in epitaxial registry with the underlying silicon substrate.

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