Laser decapsulation apparatus and method

Details Laser decapsulation apparatus and method Laser decapsulation apparatus and method

2007-01-23

2007-01-23

Zervigon, Rudy (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With means for photochemical energization of a gas using...

C219S121660, C505S410000, C216S094000

Reexamination Certificate

active

09949736

ABSTRACT:
A decapsulation apparatus100has a laser8that removes plastic encapsulant from a device24.Chamber20is sealed. Exhaust port9removes debris and fumes. The device24is positioned and scanned using an X,Y table 2. A hinged end4rotates the device to an acute angle of incidence with respect to a laser8. Endpoint detector10senses the exposed integrated circuit and moves or shuts down the laser8.

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