Laser chamber with minimized acoustic and shock wave disturbance

Coherent light generators – Particular active media – Gas

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372 55, 372102, H01S 322

Patent

active

059784059

ABSTRACT:
A laser chamber has angled reflectors that reflect acoustic and shock waves away from the laser discharge area to minimize acoustic and shock wave disturbances. The angled reflector may have different configurations to assist in the dissipation of the acoustic and shock waves. For example, the angled reflector may have a modulated reflective surface, such as having grooves or holes defined within the surface. Further, the angled reflector may have a reflective surface with acoustic and shock wave absorbing properties. The reflective surface with absorbent properties may be a felt metal or have multiple layered porous surfaces. In addition, the walls of the laser chamber may be modulated to assist in the dissipation of the acoustic waves and shock waves through absorption, scattering, and by generating interference within the reflected waves. Multiple layered porous surfaces may be used along the walls to absorb and scatter incident waves. The walls of the laser chamber may also be covered with an acoustic and shock wave absorbing material, such as felt metal. In other embodiments, the walls of the laser chamber are modulated with grooves, such as triangular or rectangular horizontal grooves, which scatter incident waves and generate interference within reflected waves.

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Bessafi, M., Canarell, P., Fontaine, B. L., Forestier, B. M., Delaporte, Ph. C., and Sentis, M. L. "Limitations of a High Average Power Excimer Laser By Acoustic Or Shock Waves", American Institute of Physics, 1990, pp. 665-670.
Canarelli, Patrick, Sentis, Marc L., Delaporte, Philippe Ch., Fontaine, Bernard L. and Forestier, Bernard M., "Acoustic waves damping experimental study in X-ray preionized high repetition XeCl", SPIE, vol. 1278 Excimer Lasers and Applications (1990), pp. 77-87.
Truong, J. P., Sentis, M. L., Delaporte, P., Forestier, B., Fontaine B., Uteza, O. and Tassy Y., "Efficient acoustic wave damping in a high pulse repetition rate XeCl Laser", SPIE, vol. 1810, 1992.
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