Coherent light generators – Particular active media – Gas
Patent
1998-06-02
2000-01-11
Scott, Jr., Leon
Coherent light generators
Particular active media
Gas
372 98, 372 33, H01S 322
Patent
active
060143975
ABSTRACT:
A coated ceramic insulator in a laser chamber that is exposed to a gaseous environment where impurities in the ceramic insulator are prevented from detrimentally contaminating the laser chamber by a high-purity insulating coating. The insulating coating prevents chemical interactions between the ceramic insulator and the gaseous environment. In particular, the coating prevents contamination, by impurities in the ceramic insulator, of the lasing gas.
REFERENCES:
patent: 4959840 (1990-09-01), Akins et al.
patent: 5018161 (1991-05-01), Akins et al.
patent: 5771258 (1998-06-01), Morton et al.
Pulker, H.K.,Coatings on Glass, Thin Films Science and Technology, 6, Tokyo, 1984; pp. Title Page, Table of Contents--pp. xiii-xviii, 203-207, 360-361.
Ishihara Toshihiko
Morton Richard G.
Cymer Inc.
Edwards Gary J.
Jr. Leon Scott
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