Laser beam system for micro via formation

Electric heating – Metal heating – By arc

Reexamination Certificate

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Reexamination Certificate

active

06483074

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Technical Field
The present invention relates to a via formation system and more particularly to a laser system used for forming a micro via.
2. Related Art
FIGS. 1-5
illustrate a related art method of forming a microvia over a plated through hole (PTH) of a substrate. In particular,
FIG. 1
illustrates a cross sectional view of a related art substrate
12
, having a PTH
10
formed therein. The PTH
10
includes an opening
14
and a capture pad
16
formed using conventional techniques. As illustrated in
FIG. 2
, a dielectric material
18
is deposited within the opening
14
of the PTH
10
, filling the opening
14
of the PTH
10
, and coating a lower surface
20
of the substrate
12
. A plated stud
22
is attached to a capture pad
24
of the PTH
10
, as shown in FIG.
3
.
FIG. 4
illustrates an additional step after related art
FIG. 3
wherein a dielectric material
18
B is added to a top surface
26
of the substrate
12
. A cavity
16
is formed in the dielectric material
18
B by chemical etching, drilling or other mechanical method. The plated stud
22
is required to protect the dielectric material
18
B from being removed by the chemical etching or drilling processes used during formation of the cavity
16
.
FIG. 5
illustrates related art
FIG. 4
after an object
28
, such as a microvia, is attached to the plated stud
22
.
SUMMARY OF THE INVENTION
A first general aspect of the present invention provides a laser beam system comprising:
a laser system providing a bimodal focused beam, and wherein an energy density at a centroid of the beam is at least 10 percent less than the average energy density of the beam.
A second general aspect of this invention provides an apparatus comprising:
a laser source producing a laser beam; and
a beam shaping lens for forming the laser beam into a bimodal focused beam wherein an area of reduced energy density at a centroid of the bimodal focused beam is at least 10% less than an average energy density of the bimodal focused beam.
A third general aspect of this invention provides a method comprising:
applying a focused laser beam onto a circuit board wherein the focused laser beam removes a dielectric above a surface of a capture pad of a Plated Through Hole (PTH) while maintaining the dielectric within the PTH to a substantially flush level with the surface of the capture pad.


REFERENCES:
patent: 4128752 (1978-12-01), Gravel
patent: 5055653 (1991-10-01), Funami et al.
patent: 5539175 (1996-07-01), Smith et al.
patent: 5657138 (1997-08-01), Lewis et al.
patent: 5776220 (1998-07-01), Allaire et al.
patent: 5826772 (1998-10-01), Ariglio et al.
patent: 6040552 (2000-03-01), Jain et al.
patent: 62104692 (1987-05-01), None
patent: 3052790 (1991-03-01), None
patent: 10034365 (1998-02-01), None

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