Laser beam scanning system

Details Laser beam scanning system Laser beam scanning system

1981-11-25

1984-06-19

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

350358, H01J 314

Patent

active

044554850

ABSTRACT:
A laser beam scanning system for focusing a laser beam to a fine spot and for scanning precisely a large field includes an acousto-optical deflector enabled to deflect a laser beam in the direction of one axis or in the directions of two axes, while maintaining the fine spot diameter, to scan a small field, a relay lens for projecting said deflection point to the center of an objective lens, to effect the focusing of the beam to a fine spot, a high speed carriage enabled to move with high accuracy in biaxial directions, a precise position detector enabled to detect the position of the carriage, and a controller for organically controlling the aforementioned respective functions thereby to make it possible to precisely deflect the laser beam over a large field, whereby a scanning operation of a large field at a high speed and with a high accuracy is performed by the laser beam.

REFERENCES:
patent: 3514534 (1970-05-01), Korpel
patent: 3531184 (1970-09-01), Adler
patent: 4390875 (1983-06-01), McNaney

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