Laser beam scanning pattern generation system with positional an

Details Laser beam scanning pattern generation system with positional an Laser beam scanning pattern generation system with positional an

1986-11-21

1988-08-02

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356400, G01N 2186

Patent

active

047615613

ABSTRACT:
In a pattern generating system for scanning a pattern on a surface of a workpiece with a laser beam modulated by drawing data so as to form a pattern corresponding to design pattern data, a plurality of through holes are formed at predetermined positions of the workpiece. Beams transmitted through the through holes are directed to a sensor for generating a detection output representing positions of the transmitted beams. A computer generates position data of the through holes on the basis of the detection output and calculates a positional error and a deformation amount of the workpiece. A correcting device corrects the drawing on the basis of the positional error and the deformation amount.

REFERENCES:
patent: 3973825 (1976-08-01), Starkweather
patent: 4587622 (1986-05-01), Herzog
patent: 4677303 (1987-06-01), Erdman

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