Laser beam processing method and laser beam processing machine

Electric heating – Metal heating – By arc

Reexamination Certificate

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C219S121670, C219S121760

Reexamination Certificate

active

11255999

ABSTRACT:
A laser beam processing method for forming deteriorated layers along a dividing line in the inside of a workpiece by applying a pulse laser beam of a wavelength capable of passing through the workpiece along the dividing line formed on the workpiece, wherein a plurality of pulse laser beams are applied with a predetermined space therebetween in the width direction of the dividing line to form a plurality of parallel deteriorated layers along the dividing line.

REFERENCES:
patent: 6211488 (2001-04-01), Hoekstra et al.
patent: 6417485 (2002-07-01), Troitski
patent: 2004/0232124 (2004-11-01), Nagai et al.
patent: 2005/0189330 (2005-09-01), Fukuyo et al.
patent: 3-13290 (1991-01-01), None
patent: 2000-31564 (2000-01-01), None
patent: 2002-273592 (2002-09-01), None
patent: 3408805 (2003-03-01), None
patent: 2004-34120 (2004-02-01), None

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