Laser beam plasma pinch X-ray system

Details Laser beam plasma pinch X-ray system Laser beam plasma pinch X-ray system

1982-09-20

1985-03-12

Smith, Alfred E.

X-ray or gamma ray systems or devices

Source

378 34, G21G 300

Patent

active

045049645

ABSTRACT:
A system is provided for producing plasma pinch X-rays usable in X-ray lithography. Ionized heated plasma vapor is repeatably generated directly from solid material by impingement of a plurality of circumferentially spaced laser beams to generate an annulus of plasma. X-rays are generated by passing high current through the annular plasma in an axial gap between the solid material target electrode and another electrode, causing magnetic field radial inward plasma pinching to a central constricted area further heating the plasma and emitting X-rays. A central axially directed laser may further heat the plasma in the pinched area.

REFERENCES:
patent: 3680959 (1972-08-01), Schuch et al.
patent: 3746860 (1973-07-01), Shatas et al.
patent: 4042848 (1977-08-01), Lee
patent: 4184078 (1980-01-01), Nagel et al.
patent: 4201921 (1980-05-01), McCorkle
patent: 4220414 (1980-09-01), Barringer
Shatas et al., "Soft X-Rays from a Laser-Heated Dense Plasma Focus," J.O.A.P., v. 42, N. 13, pp. 5884-5886.

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