Incremental printing of symbolic information – Light or beam marking apparatus or processes – Scan of light
Reexamination Certificate
2005-05-24
2005-05-24
Pham, Hai (Department: 2861)
Incremental printing of symbolic information
Light or beam marking apparatus or processes
Scan of light
C347S258000
Reexamination Certificate
active
06897889
ABSTRACT:
A laser beam irradiating apparatus capable of achieving uniform annealing efficiently by employing a simple optical system using laser beams having attenuated regions is disclosed. It is possible to provide a method of irradiating a laser beam using the laser beam irradiating apparatus, and to provide a method of manufacturing a semiconductor device including the laser beam irradiating method in the fabrication sequence thereof.
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Pham Hai
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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