Laser-beam annealing apparatus

Details Laser-beam annealing apparatus Laser-beam annealing apparatus

1993-07-02

1995-10-03

Kunemund, Robert

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

With means for measuring, testing, or sensing

117 10, 117204, 117904, C30B 102

Patent

active

054543479

ABSTRACT:
A laser-beam annealing apparatus that provides reliable, continuous control of the intensity of the laser beam used to perform the annealing process.

REFERENCES:
patent: 4493085 (1985-01-01), Valley
patent: 4926428 (1990-05-01), Kajiyama et al.
patent: 4940505 (1990-07-01), Schachameyer et al.
patent: 4991178 (1991-02-01), Wani et al.
patent: 5105428 (1992-04-01), Pocholle et al.
patent: 5122223 (1992-06-01), Geis et al.

Affiliated with

Also associated with

Rating

Laser-beam annealing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser-beam annealing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser-beam annealing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1072176