Laser-based system for the total repair of photomasks

Details Laser-based system for the total repair of photomasks Laser-based system for the total repair of photomasks

1986-06-27

1988-02-23

Albritton, C. L.

Electric heating

Metal heating

By arc

427 531, 427140, B23K 2600

Patent

active

047272341

ABSTRACT:
An apparatus for repairing both clear and opaque defects in a photomask having a metal film pattern on a glass plate in which a visible laser light source is pulsed at selected frequencies to direct an optically focused laser beam into a gas sealed cell containing a mask. At one frequency, the laser pulses ablate opaque mask defects. At another frequency, and with the cell filled with a metal bearing gas, the laser beam causes thermal decomposition of the gas and deposition of metal to cure clear defects.

REFERENCES:
patent: 4324854 (1982-04-01), Beauchamp et al.
patent: 4606932 (1986-08-01), Oprysko et al.
patent: 4609566 (1986-09-01), Hongo et al.

Affiliated with

Also associated with

Rating

Laser-based system for the total repair of photomasks does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser-based system for the total repair of photomasks, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser-based system for the total repair of photomasks will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-604157