Laser-based method for growing array of carbon nanotubes

Details Laser-based method for growing array of carbon nanotubes Laser-based method for growing array of carbon nanotubes

2007-11-02

2010-10-26

Hendrickson, Stuart (Department: 1793)

Chemistry of inorganic compounds

Carbon or compound thereof

Elemental carbon

C423S44500R, C977S742000, C977S843000

Reexamination Certificate

active

07820133

ABSTRACT:
A method for growing an array of carbon nanotubes includes the steps of: (a) providing a substrate having a first surface and a second surface opposite to the first surface; (b) forming a catalyst film on the first surface of the substrate; (c) flowing a mixture of a carrier gas and a carbon source gas over the catalyst film; (d) providing a semiconductor laser system to generate a focused laser beam; and (e) irradiating the focused laser beam on the substrate to grow an array of carbon nanotubes on the substrate.

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