Electric heating – Metal heating – By arc
Patent
1998-10-01
2000-02-08
Mills, Gregory
Electric heating
Metal heating
By arc
21912185, B23K 2608
Patent
active
060230401
ABSTRACT:
A method for laser assisted polishing of a material layer to a desired surface, the method including the steps of setting up a laser beam in an XYZ coordinate system to ablate spurious material from the material layer at the desired surface and thereabove and scanning the laser beam across the material layer such that consecutive laser beam irradiate at least partially non-overlapping portions of the material layer and laser beam pulses from different directions in the XYZ coordinate system successively irradiate a given area of the material layer.
REFERENCES:
patent: 4190759 (1980-02-01), Hongo
patent: 4752668 (1988-06-01), Rosenfield et al.
patent: 4822975 (1989-04-01), Torigoe
patent: 4986664 (1991-01-01), Lovoi
patent: 5118917 (1992-06-01), Krieken et al.
patent: 5173441 (1992-12-01), Yu et al.
patent: 5331131 (1994-07-01), Opdyke
patent: 5483038 (1996-01-01), Ota et al
patent: 5504303 (1996-04-01), Nagy
patent: 5624436 (1997-04-01), Nakamura et al.
patent: 5742026 (1998-04-01), Dickinson, Jr. et al.
R.S. Patel, S. Mukkavilli and A. Kumar; "Grazing Angle Laser Planarization for multi-level Thin Film Structure", ISHM '95 Proceedings; pp. 31-35.
Tamir Shoshana
Zahavi Dov
Kang Gregory B.
Mills Gregory
Nath Gary M.
Zahavi Dov
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