Laser-assisted CVD process forming oxide superconducting films

Details Laser-assisted CVD process forming oxide superconducting films Laser-assisted CVD process forming oxide superconducting films

1992-02-11

1994-01-04

King, Roy

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505734, 505730, 427 62, 427596, 4272553, 4272552, 4272551, 4271263, 427314, B05D 306, C23C 1600

Patent

active

052760120

ABSTRACT:
A method is disclosed of forming an oxide superconducting film comprising the steps of (1) mixing (a) the vapors of organic metal materials in such proportions as to provide a predetermined metal composition, or (b) said organic metal materials in such proportions as to provide a predetermined metal composition vaporizing and mixture, and (2) bringing the mixture into contact with a heated substrate so that an oxide superconducting film is formed on said substrate by a chemical vapor deposition process, wherein laser light is applied onto said substrate during formation of said oxide superconducting film on said substrate, whereby the crystallographic orientation of said oxide superconducting film being formed in the irradiated area of said substrate is such that the c-axis is parallel to the substrate.

REFERENCES:
Ushida et al, "Preparation of a-axis oriented Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-8 films by laser metalorganic chemical vapor deposition", Appl. Phys. lett. 59(7) Aug. 1991 pp. 860-862.
Ushida et al, "Excimer laser-assisted chemical vapor deposition of metal-oxide thin film from B-diketonate complexes", Jpn. J. Appl. Phys. 30(1A) Jan. 1991 L35-L38.
Yamane et al, "Formation of Bismuth Strontium Calcium copper oxide superconducting films by chemical vapor deposition", Jpn. J. Appl. Phys. 27(8) Aug. 1988 pp. L1495-L1497.
Supercond. Sci. Technol. 4 (1991), pp. 445-448, T. Ushida et al, "Preparation of selectively controlled a-axis oriented YBCO films by laser MOCVD.".

Affiliated with

Also associated with

Rating

Laser-assisted CVD process forming oxide superconducting films does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser-assisted CVD process forming oxide superconducting films, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser-assisted CVD process forming oxide superconducting films will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-307136