Coherent light generators – Particular beam control device – Optical output stabilization
Reexamination Certificate
2011-04-05
2011-04-05
Rodriguez, Armando (Department: 2828)
Coherent light generators
Particular beam control device
Optical output stabilization
C372S029023, C372S031000, C372S032000, C372S055000
Reexamination Certificate
active
07920611
ABSTRACT:
It is an object to provide a laser apparatus, a laser irradiating method and a manufacturing method of a semiconductor device that make laser energy more stable. To attain the object, a part of laser beam emitted from an oscillator is sampled to generate an electric signal that contains as data energy fluctuation of a laser beam. The electric signal is subjected to signal processing to calculate the frequency, amplitude, and phase of the energy fluctuation of the laser beam. The transmittance of a light amount adjusting means is controlled in order that the transmittance changes in antiphase to the phase of the energy fluctuation of the laser beam and with an amplitude capable of reducing the amplitude of laser beam emitted from the oscillator, the control being made based on the phase difference between the phase of a signal that is in synchronization with oscillation of laser beam emitted from the oscillator and the phase calculated, on the energy ratio of the sampled laser beam to laser beam emitted from the oscillator, and on the frequency and amplitude calculated. In the light amount adjusting means, energy of the laser beam oscillated from the oscillator energy is adjusted.
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Hideaki Kusama, “Excimer Laser Annealing Apparatus”, Liquid Crystal Display Technology 2001, Electronic Material, Liquid Crystal Display Manufacturing Technology Edition, pp. 138-141; Jul. 1, 2001. (Japanese Article with Full Translation).
Koyama Masaki
Miyairi Hidekazu
Shimomura Akihisa
Takano Tamae
Tanaka Koichiro
Costellia Jeffrey L.
Nguyen Phillip
Nixon & Peabody LLP
Rodriguez Armando
Semiconductor Energy Laboratory Co,. Ltd.
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