Laser apparatus, exposure head, exposure apparatus, and...

Details Laser apparatus, exposure head, exposure apparatus, and... Laser apparatus, exposure head, exposure apparatus, and...

2005-11-01

2005-11-01

Ullah, Akm Enayet (Department: 2874)

Optical waveguides

With splice

Fusion splicing

C385S095000, C385S098000, C385S033000

Reexamination Certificate

active

06960035

ABSTRACT:
An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.

REFERENCES:
patent: 6034378 (2000-03-01), Shiraishi
patent: 6519387 (2003-02-01), Sunagawa et al.
patent: 6535271 (2003-03-01), Ogasawara
patent: 6542178 (2003-04-01), Miyagawa et al.
patent: 6717106 (2004-04-01), Nagano et al.
patent: 6768505 (2004-07-01), Zelenka

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