Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2007-12-18
2007-12-18
Booth, Richard A. (Department: 2812)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C257SE21208
Reexamination Certificate
active
10387799
ABSTRACT:
A method is disclosed to effectively achieve a low deposition temperature of CMO memory materials by depositing the CMO memory material at relatively low temperatures that give an amorphous film, then to later melt and re-crystallize the CMO memory material with a laser (laser annealing).
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Hisa Steve Kuo-Ren
Nagashima Makoto
Rinerson Darrell
Booth Richard A.
Unity Semiconductor Corporation
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