Coherent light generators – Particular component circuitry – For driving or controlling laser
Reexamination Certificate
2008-07-08
2008-07-08
Schillinger, Laura M (Department: 2813)
Coherent light generators
Particular component circuitry
For driving or controlling laser
C372S038010
Reexamination Certificate
active
10986936
ABSTRACT:
A laser beam temporally modulated in amplitude by a modulator and shaped into a long and narrow shape by a beam shaper is rotated around the optical axis of an image rotator inserted between the beam shaper and a substrate. Thus, the longitudinal direction of the laser beam having the long and narrow shape is rotated around the optical axis on the substrate. In order to perform annealing in a plurality of directions on the substrate, the laser beam shaped into the long and narrow shape is rotated on the substrate while a stage mounted with the substrate is moved only in two directions, that is, X- and Y-directions.In such a manner, the substrate can be scanned at a high speed with a continuous wave laser beam modulated temporally in amplitude and shaped into a long and narrow shape, without rotating the substrate. Thus, a semiconductor film can be annealed.
REFERENCES:
patent: 4761561 (1988-08-01), Fujiwara et al.
patent: 4928936 (1990-05-01), Ohkubo et al.
patent: 5622567 (1997-04-01), Kojima et al.
patent: 5760366 (1998-06-01), Haruta et al.
patent: 5863473 (1999-01-01), Ohsawa et al.
patent: 6002523 (1999-12-01), Tanaka
patent: 6033741 (2000-03-01), Haruta et al.
patent: 6110291 (2000-08-01), Haruta et al.
patent: 6176926 (2001-01-01), Tanaka
patent: 6303499 (2001-10-01), Sato
patent: 6310727 (2001-10-01), Tanaka
patent: 6512634 (2003-01-01), Tanaka
patent: 6583389 (2003-06-01), Murooka et al.
patent: 6677088 (2004-01-01), Magome et al.
patent: 6897963 (2005-05-01), Taniguchi et al.
patent: 6943086 (2005-09-01), Hongo et al.
patent: 6967815 (2005-11-01), Usa et al.
patent: 7082088 (2006-07-01), Arioka et al.
patent: 7129124 (2006-10-01), Hongo et al.
patent: 7183148 (2007-02-01), Yazaki et al.
patent: 2001/0032835 (2001-10-01), Murooka et al.
patent: 2001/0053030 (2001-12-01), Tanaka
patent: 2002/0187406 (2002-12-01), Magome et al.
patent: 2002/0191512 (2002-12-01), Arioka et al.
patent: 2003/0024905 (2003-02-01), Tanaka
patent: 2003/0068836 (2003-04-01), Hongo et al.
patent: 2003/0100169 (2003-05-01), Tanaka et al.
patent: 2003/0147059 (2003-08-01), Tokuda et al.
patent: 2003/0147060 (2003-08-01), Tokuda et al.
patent: 2004/0041158 (2004-03-01), Hongo et al.
patent: 2004/0057158 (2004-03-01), Usa et al.
patent: 2004/0080871 (2004-04-01), Usa et al.
patent: 2005/0030508 (2005-02-01), Tokuda et al.
patent: 2005/0070035 (2005-03-01), Yazaki et al.
patent: 2005/0139582 (2005-06-01), Tanaka
patent: 2005/0169330 (2005-08-01), Hongo et al.
patent: 2005/0170572 (2005-08-01), Hongo et al.
patent: 2005/0200823 (2005-09-01), Tokuda et al.
patent: 2005/0214986 (2005-09-01), Tanaka et al.
patent: 2006/0003478 (2006-01-01), Hongo et al.
patent: 2006/0244808 (2006-11-01), Miura
patent: 2007/0041410 (2007-02-01), Hongo et al.
patent: 2007/0099401 (2007-05-01), Tanaka
patent: 2007/0131962 (2007-06-01), Yazaki et al.
patent: 10-209069 (1998-08-01), None
patent: 11-352419 (1999-12-01), None
patent: 11-352420 (1999-12-01), None
patent: 2003-124136 (2003-04-01), None
patent: 2003-179068 (2003-06-01), None
patent: 2004-151668 (2004-05-01), None
patent: 2005217213 (2005-08-01), None
Hatano Mutsuko
Hongo Mikio
Yazaki Akio
Antonelli, Terry Stout & Kraus, LLP.
Hitachi Displays Ltd.
Schillinger Laura M
LandOfFree
Laser annealing apparatus and annealing method of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Laser annealing apparatus and annealing method of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser annealing apparatus and annealing method of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3929328