Coherent light generators – Particular component circuitry – For driving or controlling laser
Reexamination Certificate
2008-07-08
2008-07-08
Schillinger, Laura M (Department: 2813)
Coherent light generators
Particular component circuitry
For driving or controlling laser
C372S038010
Reexamination Certificate
active
07397831
ABSTRACT:
A laser beam temporally modulated in amplitude by a modulator and shaped into a long and narrow shape by a beam shaper is rotated around the optical axis of an image rotator inserted between the beam shaper and a substrate. Thus, the longitudinal direction of the laser beam having the long and narrow shape is rotated around the optical axis on the substrate. In order to perform annealing in a plurality of directions on the substrate, the laser beam shaped into the long and narrow shape is rotated on the substrate while a stage mounted with the substrate is moved only in two directions, that is, X- and Y-directions.In such a manner, the substrate can be scanned at a high speed with a continuous wave laser beam modulated temporally in amplitude and shaped into a long and narrow shape, without rotating the substrate. Thus, a semiconductor film can be annealed.
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Hatano Mutsuko
Hongo Mikio
Yazaki Akio
Antonelli, Terry Stout & Kraus, LLP.
Hitachi Displays Ltd.
Schillinger Laura M
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