Electric heating – Metal heating – By arc
Reexamination Certificate
2007-07-24
2007-07-24
Evans, Geoffrey S. (Department: 1725)
Electric heating
Metal heating
By arc
C219S121840, C219S121860
Reexamination Certificate
active
10250172
ABSTRACT:
An excimer laser annealing apparatus and the application of the same for stabilizing the atmosphere surrounding an area irradiated by an excimer laser. The apparatus includes a chamber, a gas diversion nozzle, an excimer laser and a gas supply device. The gas diversion nozzle is positioned inside the chamber. The laser beam produced by the excimer laser passes through the gas diversion nozzle. The gas supply device connects with the gas diversion nozzle for providing a jet of gas to the laser-irradiated area and carrying away any pollutants from the irradiated area.
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Au Optronics Corporation
Evans Geoffrey S.
Jianq Chyun IP Office
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