Laser anneal apparatus

Details Laser anneal apparatus Laser anneal apparatus

2005-12-13

2009-06-23

Evans, Geoffrey S (Department: 3742)

Electric heating

Metal heating

By arc

C219S121610, C219S121620

Reexamination Certificate

active

07550694

ABSTRACT:
A laser anneal apparatus is provided with a laser source; a homogenizing optical system disposed in an optical path of laser light emitted from the laser source to homogenize an intensity distribution of the laser light in a section which is perpendicular to the optical path; a phase shifter disposed in the optical path of the laser light passed through the homogenizing optical system to produce an intensity distribution pattern of the laser light in the section which is perpendicular to the optical path; a photoreceptor device disposed in the optical path of the laser light passed through the phase shifter to intercept a part of the laser light and to measure a quantity of the intercepted laser light; and an image-forming optical system disposed in the optical path of the laser light passed through the photoreceptor device to focus the laser light on a substrate to be treated.

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“Flat Panel Display 1999”, Nikkei Micro Device Separate Volume, Nikkei BP Inc., 1998, pp. 132-139.

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