Laser alignment target

Details Laser alignment target Laser alignment target

1998-03-13

1999-12-14

Saadat, Mahshid

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

774773, 774752, H01L 2348, H01L 2352, H01L 2940

Patent

active

060021829

ABSTRACT:
A technique to form a structure with a rough topography (415) in a planarized semiconductor process. The rough topography (415) is formed by creating cored contacts (433). Subsequent process layers may be further stacked on top of the cored contacts in order to augment the nonplanar characteristics of the cored contacts. This rough topography structure may be used to align integrated circuits and wafers. An integrated circuit may be laser aligned using this alignment structure.

REFERENCES:
patent: 4609986 (1986-09-01), Hartmann et al.
patent: 4617479 (1986-10-01), Hartmann et al.
patent: 4677318 (1987-06-01), Veenstra et al.
patent: 4713792 (1987-12-01), Hartmann et al.
patent: 4871930 (1989-10-01), Wong et al.
patent: 4884123 (1989-11-01), Dixit et al.
patent: 4899067 (1990-02-01), So et al.
patent: 4912342 (1990-03-01), Wong et al.
patent: 4933303 (1990-06-01), Mo
patent: 5069749 (1991-12-01), Gutierrez
patent: 5121006 (1992-06-01), Pedersen et al.
patent: 5241224 (1993-08-01), Pedersen et al.
patent: 5247478 (1993-09-01), Gupta et al.
patent: 5260610 (1993-11-01), Pedersen et al.
patent: 5260611 (1993-11-01), Cliff et al.
patent: 5294975 (1994-03-01), Norman et al.
patent: 5350954 (1994-09-01), Patel et al.
patent: 5354712 (1994-10-01), Ho et al.
patent: 5488007 (1996-01-01), Kim et al.
patent: 5567650 (1996-10-01), Straight et al.
patent: 5712207 (1998-01-01), Lee et al.
patent: B14617479 (1993-09-01), Hartmann et al.
TLSI "Design Guidelines for Laser Fusing of ID Tags," Feb. 19, 1991, 7 pages.
Xilinx Programmable Logic Data Book, chapter entitled "XC4000, XC4000A, XC4000H Logic Cell Array Families", 1994, Revised Apr. 1995, pp. 2-7 to 2-46.
Article in E E Times, "DAC Briefs: Chip Express Introduces Laser-Programming Arrays," Jun. 10, 1996, 1 page.
Article in Elec. Buyers' News, "LPGAs: An `In-Between` Solutn.," Jul. 1, 1996, 1 page.
Chip Express Press Release, "The Chip Express QYH500 Laser Gate Array (LPGA) Family Now Supports 3-Volt Custom Designs," Santa Clara, CA, May 17, 1996, 1 page.
Chip Express Press Release, "Chip Express Unviels a 200,000 Gate LPGA Family with Configurable Embedded SRAM: The CX2000 New Gate Array Architecture Eases Deep Sub-micron Designs," Las Vegas, NV, Jun. 3, 1996, 2 pages.
Chip Express Press Release, "Chip Express Annouces Low-Production Volumn OneMask.RTM. Gate Arrays Screened to Military Standard 883: Rapid-Turn Laser-Prototyping Used by the Military," Santa Clara, CA, Aug. 21, 1995, 2 pages.
World Wide Web Chip Express Page, About Chip Express Technology Overview, 6 pages, 1996.
World Wide Web Chip Express Page, Product & Services "Production Technologies," 2 pages, 1996.
World Wide Web Chip Express Page, Product & Services "Prototyping with LPGA," 3 pages, 1996.
Smith, et al., "Laser Programmable Redundancy and Yield Improvement in a 64K DRAM," IEEE Journal of Solid-State Circuits, vol. SC-16, No. 5, Oct. 1981, pp. 506-513.

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