Laser alignment for ion source

Optics: measuring and testing – Angle measuring or angular axial alignment – Alignment of axes nominally coaxial

Reexamination Certificate

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Reexamination Certificate

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11083236

ABSTRACT:
An apparatus and method for aligning a laser beam in an ion source. A mounting member has a first end, a second end, and an axis. An awl is positioned on the axis and operably connected to the first end. A biasing member is arranged to urge the awl along the axis when the apparatus is mounted on the ion source to create a mark for aligning the laser beam.

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patent: 5864137 (1999-01-01), Becker et al.
patent: 6175112 (2001-01-01), Karger et al.
patent: 6707039 (2004-03-01), Truche et al.
patent: 6952011 (2005-10-01), Brown et al.
patent: 6956208 (2005-10-01), Reilly et al.
patent: 2003/0160167 (2003-08-01), Truche et al.
patent: 2003/0233098 (2003-12-01), Markworth
patent: 2004/0021071 (2004-02-01), Mordekhay
patent: 2005/0045815 (2005-03-01), Bui

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