Laser alignment detector

Details Laser alignment detector Laser alignment detector

1977-12-22

1981-12-22

Krawczewicz, Stanley T.

Electricity: measuring and testing

Conductor identification or location

Inaccessible

219121L, 250491, 318640, 356152, G01R 2702

Patent

active

043073387

ABSTRACT:
A detector for application to integrated circuits useful in determining the alignment of a trimming laser. A metallization pattern is employed along with electrical detection circuitry to determine when the trimming laser becomes misaligned by a predetermined amount. The laser is precision aimed when the integrated circuit wafer is located in a step and repeat machine. As stepping continues the detector provides an indication when the cumulative error exceeds the predetermined value.

REFERENCES:
patent: 3388461 (1968-06-01), Lins
patent: 3423589 (1969-06-01), Bardwell et al.
patent: 3448280 (1969-06-01), Blitchington, Jr. et al.
patent: 3699649 (1972-10-01), McWilliams
patent: 3739247 (1973-06-01), Yamaguchi et al.
patent: 3758745 (1973-09-01), Wilker et al.

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