Laser ablation top surface reference chuck

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper

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Details

355 53, 430 5, H02N13/00

Patent

active

059055669

ABSTRACT:
A reference chuck which is used with a leveling device for holding microelectronic substrates and other electronic component substrates for laser ablation and other exposure processes, the chuck comprising a frame body for supporting the substrate to be processed, clamping means at the periphery of the frame body for holding the substrate to the frame body and elastomeric means for urging the substrate mounted in the reference chuck against the clamping means. The undersides of the clamping means which contacts the upper surface of the substrate forms in its tightened position a clamping plane which clamping plane is parallel with an established plane of the lower surface of the chuck. The reference chuck provides a very low profile envelope for use with conventional leveling devices and the top surface of the substrate and the lower surface of the reference chuck are in parallel planes when the chuck is placed on the working surface of the leveling device.

REFERENCES:
patent: 4412133 (1983-10-01), Eckes et al.
patent: 4724222 (1988-02-01), Feldman
patent: 4742376 (1988-05-01), Phillips
patent: 5142154 (1992-08-01), Komagata
patent: 5152707 (1992-10-01), Dougherty et al.
patent: 5227606 (1993-07-01), Weeks et al.
patent: 5374829 (1994-12-01), Sakamoto et al.
patent: 5471279 (1995-11-01), Takizawa

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