Laser ablation method for depositing fluorinated Y-Ba-Cu-O super

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k

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505731, 505780, 427531, 427 62, H01L 3912

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active

051243105

ABSTRACT:
A thin film, fluorinated, ceramic defect-oxide type superconducting material grown on a substrate such as sapphire or stainless steel. The superconducting material is characterized by basal plane alignment of the unit cells thereof even though the substrate does not possess a perovskite-type lattice structure. A laser ablation technique is used to evaporate material from a fluorinated pellet of target material to deposit the fluorinated superconducing material on the substrate, which is heated during the deposition process. The instant invention provides for a low pressure and relatively low temperature method of depositing a superconducting film which is characterized by (1) a minimal number of high angle grain boundaries typically associated with polycrystalline films, and (2) aligned a, b, and c axes of the unit cells thereof so as to provide for enhanced current carrying capacities. Further, the method of this invention provides for the deposition of superconducting material without a post deposition anneal. Large area, irregularly shaped rolls of inexpensive substrate material can be uniformly covered by the method described herein.

REFERENCES:
L. Lynds et al. "Superconducting thin films of Y-Ba-Cu-O produced by neodymium: ytrium aluminum garnet laser ablation", Appl. Phys. Lett., vol. 52 (4) pp. 320-322, Jan. 25, 1988.
A. M. DeSantolo et al. "Preparation of high T.sub.c and J.sub.c films of Ba.sub.2 YCu.sub.3 O.sub.7 using laser evaporation of a composite target containing Baag37 F.sub.2 ", Appl. Phys. Lett., vol. 52 (23) pp. 1995-1997, Jun. 6, 1988.

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