Laser ablation forward metal deposition with electrostatic assis

Details Laser ablation forward metal deposition with electrostatic assis Laser ablation forward metal deposition with electrostatic assis

1995-03-31

1996-10-22

Walberg, Teresa J.

Electric heating

Metal heating

By arc

24912165, 24912174, 24912176, 24912185, 1562728, 1562731, 427469, 427555, 427597, B23K 2600

Patent

active

055673368

ABSTRACT:
Apparatus and method for metal line deposition on a substrate. Laser ablation of a metal film coated on a first substrate removes metal ions from the film. The ions travel forward to a surface of a second substrate disposed opposite the metal film on the first substrate and are deposited on the second substrate. A positive electrode on the first substrate, a negative electrode on the second substrate, and a power supply create an electric field that is simultaneously applied across the first and second substrates to bond the metal ions to the second substrate. Bonding is enhanced by repeated reflecting a laser beam through the second substrate to heat the second substrate. The laser beam is reflected between a reflector and the deposited metal line.

REFERENCES:
patent: 3560258 (1971-02-01), Brisbane
patent: 3757078 (1973-09-01), Conti et al.
patent: 3781978 (1974-01-01), Intrator et al.
patent: 4294602 (1981-10-01), Horne
patent: 4349583 (1982-09-01), Kulynych et al.
patent: 4622058 (1986-11-01), Leary-Renick et al.
patent: 4752455 (1988-06-01), Mayer
patent: 4879450 (1989-11-01), Valentin et al.
patent: 4895735 (1990-01-01), Cook
patent: 4933204 (1990-06-01), Warren, Jr. et al.
patent: 4987006 (1991-01-01), Williams et al.
patent: 5057184 (1991-10-01), Gupta et al.
patent: 5079070 (1992-01-01), Chalco et al.
patent: 5141602 (1992-08-01), Chen et al.
patent: 5153408 (1992-10-01), Handford et al.
patent: 5175504 (1992-12-01), Henley
patent: 5177594 (1993-01-01), Chance et al.
patent: 5203929 (1993-04-01), Takayanagi et al.
patent: 5235272 (1993-08-01), Henley
patent: 5246745 (1993-09-01), Baum et al.
patent: 5481082 (1996-02-01), Yamamoto
patent: 5495089 (1996-02-01), Freedman et al.

Affiliated with

Also associated with

Rating

Laser ablation forward metal deposition with electrostatic assis does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser ablation forward metal deposition with electrostatic assis, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser ablation forward metal deposition with electrostatic assis will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2356082