Laser ablation control system and method

Details Laser ablation control system and method Laser ablation control system and method

1994-09-09

1996-06-04

Evans, Geoffrey S.

Electric heating

Metal heating

By arc

21912171, 21912183, 36447408, B23K 2604

Patent

active

055235433

ABSTRACT:
The laser ablation control system and method described is active in starting laser ablation, continuing laser ablation and finally tuning laser ablation in view of product output. First, it provides a means of generating initial settings for laser ablation tool operation utilizing the high predictability of ablation on substrates of known composition. Second, it provides real time monitoring and control of the laser output in terms of the characteristics important to the system performance as it relates to the abalation process. Third, it entails statistical analysis of the photo ablated pattern with correspondent adjustment to abalation parameters. Most importantly, these elements are continuously combined to achieve optimized performance monitored during the ablation process.

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patent: 5166492 (1992-11-01), Rivera
patent: 5173441 (1992-12-01), Yu et al.
patent: 5204517 (1993-04-01), Cates et al.
patent: 5362940 (1994-11-01), MacDonald et al.
patent: 5386430 (1995-01-01), Yamagishi et al.

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