Laser ablation apparatus

Details Laser ablation apparatus Laser ablation apparatus

1994-12-07

1995-08-29

Scott, Jr., Leon

Coherent light generators

Miscellaneous

356381, H01S 300

Patent

active

054467551

ABSTRACT:
A laser ablation apparatus includes a laser oscillator, a condenser lens for condensing a laser light generated from the oscillator, a rotary cylindrical target having a side face which is illuminated by the laser light, a driving device for rotating the target, a substrate carrier device for moving a substrate in a direction parallel to a tangential direction of the cylindrical target, and a vacuum chamber located above the substrate. The vacuum chamber encloses a part of the cylindrical target, and has an open laser inlet port so that the side face of the target is illuminated by the laser light passing through the laser inlet port to adhere material evaporated from the target to the substrate when the substrate passing through the vacuum chamber.

REFERENCES:
patent: 3654624 (1972-04-01), Becker et al.
patent: 4676646 (1987-06-01), Strand et al.
patent: 5018164 (1991-05-01), Brewer et al.
Machines and Tools, "Practical Success of Ceramics Deposition Apparatus by the Use of Laser" by A. Ohmine; Jul. 1990.

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