Large scale patterned growth of aligned one-dimensional...

Details Large scale patterned growth of aligned one-dimensional... Large scale patterned growth of aligned one-dimensional...

2008-04-01

2008-04-01

Mai, Anh D. (Department: 2814)

Semiconductor device manufacturing: process

Having organic semiconductive component

C438S104000, C257S040000, C257S043000, C257SE51001, 43

Reexamination Certificate

active

07351607

ABSTRACT:
A method of making nanostructures using a self-assembled monolayer of organic spheres is disclosed. The nanostructures include bowl-shaped structures and patterned elongated nanostructures. A bowl-shaped nanostructure with a nanorod grown from a conductive substrate through the bowl-shaped nanostructure may be configured as a field emitter or a vertical field effect transistor. A method of separating nanoparticles of a desired size employs an array of bowl-shaped structures.

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Aarik, Jaan, et al., “Atomic layer growth of epitaxial TiO2 thin films from TiCI4 and H2O on AI2O3 substrates”, Journal of Crystal Growth, (2002), pp. 189-198.

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