Large NA projection lens system with aplanatic lens element for

Details Large NA projection lens system with aplanatic lens element for Large NA projection lens system with aplanatic lens element for

1998-06-04

1999-11-16

Sugarman, Scott J.

Optical: systems and elements

Lens

Multiple component lenses

359649, G02B 964

Patent

active

059868244

ABSTRACT:
Projection lens systems for transferring a pattern on a reticle onto a wafer having an aplanatic lens element. The aplanatic lens element has a shape factor between 0.1 and 0.224, the projection lens system satisfies the condition:

REFERENCES:
patent: 4770477 (1988-09-01), Shafer
patent: 4812028 (1989-03-01), Matsumoto
patent: 4891663 (1990-01-01), Hirose
patent: 4948238 (1990-08-01), Araki
patent: 4964704 (1990-10-01), Shinohara
patent: 5142409 (1992-08-01), Hanzawa et al.
patent: 5260832 (1993-11-01), Togino et al.
patent: 5323263 (1994-06-01), Schoenmakers
patent: 5448408 (1995-09-01), Togino et al.
patent: 5519537 (1996-05-01), Shikama
patent: 5555479 (1996-09-01), Nakagiri
patent: 5636000 (1997-06-01), Ushida et al.

Affiliated with

Also associated with

Rating

Large NA projection lens system with aplanatic lens element for does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Large NA projection lens system with aplanatic lens element for , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Large NA projection lens system with aplanatic lens element for will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1331715