Large force and displacement piezoelectric MEMS lateral...

Details Large force and displacement piezoelectric MEMS lateral... Large force and displacement piezoelectric MEMS lateral...

2011-01-25

2011-01-25

Rosenau, Derek J (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S330000, C310S333000

Reexamination Certificate

active

07876026

ABSTRACT:
A piezoelectric microelectromechanical systems (MEMS) actuator includes a silicon substrate; an actuator beam comprising a first end region connected to the silicon substrate and a second end region connected to a mechanically compliant spring assembly; a first electrode over the silicon substrate; a piezoelectric layer above the first electrode; a second electrode over the piezoelectric layer; a conductive top structural layer above the second electrode, wherein a center half of the actuator beam is configured as a positive deflection region, and wherein both the first electrode and the second electrode supply voltage to both positive and negative deflection regions of the actuator beam.

REFERENCES:
patent: 2008/0061916 (2008-03-01), Pulskamp

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