Photocopying – Projection printing and copying cameras – Reflector between original and photo-sensitive paper
Reexamination Certificate
2007-01-02
2007-01-02
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Reflector between original and photo-sensitive paper
C345S012000, C359S366000, C359S727000, C359S730000, C359S731000, C355S053000
Reexamination Certificate
active
10831210
ABSTRACT:
An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage adapted to support a reticle. A substrate stage is adapted to support a substrate. A reflective optical system is adapted adapted to image the reticle onto the substrate. The reflective optical system includes a primary mirror including a first mirror and a second mirror, and a secondary mirror. The reflective optical system has sufficient degrees of freedom for both alignment and correction of third order aberrations when projecting an image of the reticle onto the substrate by reflections off the first mirror, the secondary mirror, and the second mirror.
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Search Report for Singapore Appln. No. 200403806-3, dated Nov. 29, 2004, 5 pages.
de Jager Patrick
Gui Cheng-Qun
Harned Robert D.
ASML Holding N.V.
Fuller Rodney
Sterne, Kessler, Goldstein & Fox P.L.L.C
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