Large crystal float zone apparatus

Chemical apparatus and process disinfecting – deodorizing – preser – Physical type apparatus – Crystallizer

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156DIG98, 156620, 75 65ZM, C30B 108

Patent

active

042580099

ABSTRACT:
Apparatus for the float zone refining of large semiconductor crystals. Additional support in the form of lightweight pins is provided for the growing monocrystalline rod to hold the rod on the proper vertical axis. The pins protrude from the telescoping inner wall portion of the refining enclosure. This telescoping enclosure portion allows the pins to be in synchronous motion with the monocrystalline rod and also reduces the overall height of the apparatus.

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patent: 4116329 (1978-09-01), Garden

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