Large area X-ray imager and method of fabrication

Details Large area X-ray imager and method of fabrication Large area X-ray imager and method of fabrication

1993-12-29

1995-01-10

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

250580, G01N 2304, G01T 124, H01L 31115

Patent

active

053810147

ABSTRACT:
A large area X-ray image capture element is fabricated by juxtaposing a plurality of discrete array modules in an assembly over the top surface of a base plate, such that each module is disposed adjacent at least one other module to form a two-dimensional mosaic of modules. Each of the discrete modules includes a plurality of thin-form transistors arrayed adjacent the top surface of a dielectric substrate wherein at least one precision-ground edge forms a precise abutment with a precision-ground edge of another substrate. A continuous radiation detecting layer is disposed over the plurality of juxtaposed modules, and produces a latent radiographic image in the form of electrical charges. Such a method minimizes or totally voids the non-radiation-detecting areas created at the borders between the array modules.

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