Radiant energy – Irradiation of objects or material
Patent
1995-05-23
1996-12-17
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
2504931, G01N 2100
Patent
active
055856411
ABSTRACT:
Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source. A contamination-free VUV light source having a 225 cm.sup.2 emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm.sup.2 at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing.
REFERENCES:
patent: 4945290 (1990-07-01), Eliasson et al.
patent: 5083030 (1992-01-01), Stavov
patent: 5136170 (1992-08-01), Gellert
patent: 5173638 (1992-12-01), Eliasson et al.
A. S. Bashkin et al., "High-Power 1 .mu.sec Ultraviolet Radiation Source For Pumping Of Gas Lasers," Sov. J. Quantum Electron. 6, 994-996 (1976).
R. E. Beverly, III et al., "Ultraviolet Spectral Efficiencies Of Surface-Spark Discharges With Emphasis On the Iodine Photodissociation Laser Pumpband," Appl. Optics 16, 1572-1577 (1977).
Quigley Gerard P.
Sze Robert C.
Anderson Bruce C.
Freund Samuel M.
The Regents of the University of California
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